A MEMS toolkit for metal-oxide-based gas sensing systems

Author:

Müller G,Friedberger A,Kreisl P,Ahlers S,Schulz O,Becker T

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference29 articles.

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5. B. Kamp, Beiträge zur Sensorik Redox-aktiver Gase, Ph.D. Thesis, University of Stuttgart, Stuttgart, 2002

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