Author:
Yang Hee-Sun,Choi Se-Young,Hyun Sang-Hoon,Park Chan-Gyung
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Low dielectric-constant insulators for electronics applications
2. S.P. Murarka, Metallization—The Theory and Practice for VLSI and ULSI, Butterworth Heinemann, 1993.
3. Preparation of Low-Density Aerogels at Ambient Pressure
4. Silica aerogel films at ambient pressure
5. C.J. Brinker, G.W. Scherer, Sol-Gel Science, Academic Press, New York, 1990.
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