Investigation of borophosphosilicate glass roughness and planarization with the atomic force microscope technique-Reference-Cited by-同舟云学术

Investigation of borophosphosilicate glass roughness and planarization with the atomic force microscope technique

Published:1999-09 Issue:1-2 Volume:352 Page:77-84
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tang S.K,Vassiliev V.Y,Mridha S,Chan L.H

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference30 articles.

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