A study of the NiSi to NiSi2 transition in the Ni–Si binary system-Reference-Cited by-同舟云学术

A study of the NiSi to NiSi2 transition in the Ni–Si binary system

Published:1999-06 Issue:1-2 Volume:347 Page:201-207
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Julies B.A,Knoesen D,Pretorius R,Adams D

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. S.P. Murarka, Silicides for VLSI Applications, Academic Press, New York, 1983.

2. Platinum silicide ohmic contacts to shallow junctions in silicon

3. B.A. Julies, in: Cross-sectional Transmission Electron Microscopy of Nickel Silicide Formation, University of the Western Cape, Bellville, 1993.

4. J. Baglin, F. d'Heurle, S. Petersen, in: J. Poate, J. Baglin (Ed.), Thin Film Interfaces and Interactions, Electrochemical Society, Princeton, NJ, 1980, p. 341.

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