Author:
Kim Jean-Jong,Park Hyung-Ho,Hyun Sang-Hoon
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Fundamentals of Plasma Chemistry and Technology;Boenig,1988
2. Plasma Deposition, Treatment, and Etching of Polymers;D'Agostino,1990
3. Low-pressure plasma cleaning: a process for precision cleaning applications
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献