Fabrication of a nanosize Si-tip coated with a thin diamond-like carbon film-Reference-Cited by-同舟云学术

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Fabrication of a nanosize Si-tip coated with a thin diamond-like carbon film

Published:1997-02 Issue:1-2 Volume:294 Page:157-159
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Jung Mi-Young,Kim D.W.,Choi S.S.,Kim Yong-suk,Kuk Y.,Park K.C.,Jang J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. C.A. Spindt, I. Brodie, L. Humphrey and E.R. Westerberg, J. Appl. Phys., 47 (1976) 5242.

2. J. Liu, V.V. Zhirmov, A.F. Myers, S.G.J. Wojak, W.B. Choi, J.J. Hren, S.D. Wolter, M.T. McClure, B.R. Stoner and J.T. Glass, J. Vac. Sci. Technol. B, 13 (2) (1995) 422.

3. P.R. Schwoebel, C.A. Spindt and I. Brodie, J. Vac. Sci. Technol. B, 13 (2) (1995) 338.

4. J.C. Angus and C.C. Hayman, Science, 241 (1988) 913.

5. J. Robertson and E.P. O'Reilly, Phys. Rev. B., 35 (6) (1987) 2946.

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