Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process-Reference-Cited by-同舟云学术

Fabrication of diamond microstructures for microelectromechanical systems (MEMS) by a surface micromachining process

Published:1999-02 Issue:1-2 Volume:340 Page:1-6
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Ramesham Rajeshuni

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Growth of diamond at the atmospheric pressure of hydrogen and methane by a hot-filament technique

2. Fluid boundary layer effects in atmospheric-pressure plasma diamond film deposition

3. M. Murakawa, T. Okada, S. Takeuchi, in: M. Yoshikawa, M. Murakawa, Y. Tzeng, W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 497.

4. A. Hirata, T. Uchida, M. Yoshikawa, in: M. Yoshikawa, M. Murakawa, Y. Tzeng, W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 469.

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