Author:
Kwak M.Y.,Shin D.H.,Kang T.W.,Kim K.N.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Evolution and Current Status of Aluminum Metallization
2. J.F. Shackelford, Materials Science for Engineers, MacMillan, New York, 1988, p. 508.
3. H. Miyazaki, K. Hinode, Y. Homma, K. Mukai, Extend. Abstracts of 48th Full Meeting, Jpn. Soc. Appl. Phys., 1987, p. 329.
4. S.P. Murarka, Silicides for VLSI Applications, Academic, New York, 1983, p. 78.
Cited by
78 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献