Internal stress and adhesion of thin films sputtered onto glass by an in-line sputtering system
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Process Control For Sputter Deposition Of Low Emissivity Films In Large Scale Production
2. Effect of internal stress on adhesion and other mechanical properties of evaporated indium tin oxide (ITO) films
3. Optical and mechanical properties of Cr and CrNx films by dc magnetron sputtering
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