Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. H.P. Zappe, Introduction to Semiconductor Integrated Optics, Artch House, Boston, 1995.
2. Silicon nitride films on silicon for optical waveguides
3. Low loss Si_3N_4–SiO_2 optical waveguides on Si
4. Development of a Cluster Tool and Analysis of Deposition of Silicon Oxide by TEOSO2 PECVD
5. N.I. Morimoto, J.W. Swart, F.M. Yoshihiro, in: Proceedings of the Xth Congress of the Brazilian Microelectronic Socitety, vol. 1, 1995, p. 341.
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