Sub-nanometric precision displacement sensing using low mass and rough surfaces as movable targets
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
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4. Electronic speckle pattern interferometric system based on a speckle reference beam;Sletteemoen;J Appl Opt,1980
5. Wavelength or length measurements by reversible fringe counting;Peck;Opt Soc Am,1953
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