Subject
General Physics and Astronomy,General Materials Science
Cited by
11 articles.
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1. Properties of Fluids and Materials at Cryogenic Temperatures;International Cryogenics Monograph Series;2019
2. Gas-Phase Wafer Cleaning Technology;Handbook of Silicon Wafer Cleaning Technology;2018
3. Gas-phase Wafer Cleaning Technology;Handbook of Silicon Wafer Cleaning Technology;2008
4. UV/Ozone Cleaning of Surfaces;Treatise on Clean Surface Technology;1987
5. UV/ozone cleaning of surfaces;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1985-05