Fabrication and characterization of Ti–Ni shape memory thin film using Ti/Ni multilayer technique
Author:
Affiliation:
1. Institute of Materials Science, University of Tsukuba,Tsukuba, Ibaraki, 305-8573, Japan
Publisher
Informa UK Limited
Subject
General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1016/j.stam.2005.05.006
Reference20 articles.
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2. M. Kohl, K.D. Skrobanek, S. Miyazaki, Development of stressoptimised shape memory microvalves, Sensors and Actuators A: Phys 72 (1999) 243–250.
3. S. Miyazaki, M. Hirano, V.H. No, Dynamic characteristics of diaphragm microactuators utilizing sputter-deposited TiNi shape-memory alloy thin film, Mater. Sci. Forum 349–395 (2002) 467–474.
4. Y. Fu, W. Huang, H. Du, X. Huang, J. Tan, X. Gao, Characterization of TiNi shape-memory alloy thin films for MEMS applications, Surf. Coat. Technol. 145 (2001) 107–112.
5. A. Ishida, A. Takei, S. Miyazaki, Shape memory thin film of Ti–Ni formed by sputtering, Thin Solid Films 228 (1993) 210–214.
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