Sputtering and chemical etching of carbon in a dc glow discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference3 articles.
1. The chemical sputtering of graphite in an oxygen plasma
2. rf Sputtering of graphite in argon-oxygen mixtures
3. Treating and passivating vacuum systems and components in cold cathode discharges
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