DSMC calculations of blade rows of a turbomolecular pump in the molecular and transition flow regions
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference7 articles.
1. High-vacuum technology (a practical guide);Hablanian,1990
2. Vacuum Science and Technology;Hablanian,1994
3. The Axial Flow Molecular Pump : 4th Reprot, Performance of a Rotor with a Single Blade Row in the Transition Flow Regime
4. Performance of a Turbomolecular Pump in the Transition and Slip Flow Regimes
5. Molecular Gas Dynamics;Bird,1976
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