A low-energy ion beam system for studying energetic ion deposition on Silicon surfaces
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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3. Evidence of dissociative collision induced diatomic and triatomic hydrogen ion formation from hydrocarbon ion interaction with silicon surface;The Journal of Chemical Physics;2004-10-15
4. Disruption of the Si(1 0 0)-2 × 1 surface by very low-energy ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-04
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