Extending the range of pressure generated dynamically up to 100Pa in a calibration chamber pumped by a turbomolecular pump-Reference-Cited by-同舟云学术

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Extending the range of pressure generated dynamically up to 100Pa in a calibration chamber pumped by a turbomolecular pump

Published:2002-09 Issue:3-4 Volume:67 Page:307-310
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Staněk F,Tesař J,Peksa L,Gronych T,Řepa P

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference1 articles.

1. Edelmann Ch. Wissensspeicher Vakuumtechnik. VEB Fachbuchverlag Leipzig 1985. p. 72.

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