The performance assessment of sputter ion pumps-Reference-Cited by-同舟云学术

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The performance assessment of sputter ion pumps

Published:1966-12 Issue:12 Volume:16 Page:653-657
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Andrew D

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference9 articles.

1. Electronic Ultra‐High Vacuum Pump

2. Trans 10 AVS Nat Vac Symp;Stickney,1963-1964

3. N W Robinson, Brit Pat Appl 39395/65.

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pumping Speed;A Users Guide to Vacuum Technology;2023-11-20

2. Conditioning of a distributed ion pump;Vacuum;1994-01

3. Pumps;Ultrahigh Vacuum Practice;1985

4. In situ observation of a cathode surface contamination of a sputter ion pump by Auger electron spectroscopy;Journal of Vacuum Science and Technology;1981-04

5. Pumps for ultra-high vacuum;Vacuum;1978-05

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