Study of the processes occurring when sputtering YBa2Cu3O7 − x in pure oxygen
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference28 articles.
1. Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from highTcbulk material
2. Insituepitaxial growth of Y1Ba2Cu3O7−xfilms by molecular beam epitaxy with an activated oxygen source
3. Epitaxial films of YBa2Cu3O7−δon NdGaO3, LaGaO3, and SrTiO3substrates deposited by laser ablation
4. Thin superconducting oxide films
5. Reliable single‐target sputtering process for high‐temperature superconducting films and devices
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1. Investigations on morphological and electrical studies of sputtered MoO3 films;Journal of Materials Science: Materials in Electronics;2015-12-17
2. Effect of substrate temperature on the structural, electrical and optical behaviour of reactively sputtered Ag–Cu–O films;Physica Scripta;2011-09-22
3. Effect of substrate temperature on the physical properties of dc magnetron sputtered Cu2O films;physica status solidi (a);2006-04
4. Structure, electrical and optical properties of dc magnetron sputtered cadmium indate films: Effect of substrate temperature;Materials Letters;2006-01
5. Optical emission spectroscopy and Langmuir probe characterisation of the plasma during high-pressure sputter deposition of high-Tc superconducting YBa2Cu3O7−x thin films;Vacuum;2002-12
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