Thin CNx films prepared by vacuum rapid thermal annealing
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4
2. Metal-insulator transitions and weak ferromagnetism in the electron-correlated systemNd1−xCaxTiO3(0≤x≤1)
3. Polycrystalline ?-C3N4 thin films
4. Carbon nitride films synthesized by NH3-ion-beam-assisted deposition
5. Carbon nitride films synthesized by combined ion-beam and laser-ablation processing
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1. XPS study of BNx nanolayers prepared by low pressure rapid thermal annealing in ammonia;Journal of Physics: Conference Series;2008-05-01
2. X-ray photoelectron spectroscopy study of carbon nitride films;Surface and Coatings Technology;2000-03
3. Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors;Chemical Vapor Deposition;1999-12
4. Raman and X-ray photoelectron spectroscopy study of carbon nitride thin films;Applied Surface Science;1999-10
5. Spectroscopic characterization of thin SiC films;Diamond and Related Materials;1999-06
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