Manufacture of complex optical multilayer filters using an automated deposition system-Reference-Cited by-同舟云学术

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Manufacture of complex optical multilayer filters using an automated deposition system

Published:1998-12 Issue:4 Volume:51 Page:647-654
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Sullivan BT,Dobrowolski JA,Clarke G,Akiyama T,Osborne N,Ranger M,Howe L,Matsumoto A,Song Y,Kikuchi K

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Optical thin film synthesis program based on the use of Fourier transforms

2. Furman, Sh.A. and Tikhonravov, A.V., Optics of Multilayer Systems. Editions Frontieres, Paris, 1992

3. Implementation of a numerical needle method for thin-film design

4. Deposition error compensation for optical multilayer coatings I Theoretical description

5. Deposition error compensation for optical multilayer coatings II Experimental results—sputtering system

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