The outgassing from TiN and BN films grown on stainless steel by IBAD
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Sources of Gas in an Accelerator Vacuum Chamber;Vacuum in Particle Accelerators;2019-11-08
2. Effect of heat treatments and coatings on the outgassing rate of stainless steel chambers;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-03
3. Measurement of Outgassing in a Vacuum Environment;Key Engineering Materials;2005-01
4. Investigation of gas species in a stainless steel ultrahigh vacuum chamber with hot cathode ionization gauges;Measurement Science and Technology;2003-12-11
5. Thermal and non-thermal surface phenomena and their impact on vacuum;Vacuum;2002-01
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