Effect of vacuum rapid thermal annealing on the properties of SiNx films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
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2. Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film;Journal of Physics: Condensed Matter;2009-02-13
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5. Electrical Characterization and Measurements of Sin Thin Films On Crystalline Silicon Substrates By Pecvd;Proceedings of ISES World Congress 2007 (Vol. I – Vol. V);2008
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