Characterisation of a saddle field fast atom beam source and its application to the growth of diamond-like carbon films-Reference-Cited by-同舟云学术

Characterisation of a saddle field fast atom beam source and its application to the growth of diamond-like carbon films

Published:2000-09 Issue:4 Volume:58 Page:609-627
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Sarangi D,Panwar O.S,Kumar Sushil,Bhattacharyya R

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference14 articles.

1. Kruzelecky RV, Zukotynski S. In: Plasma properties deposition and etching, Materials Science Forum, vol. 89. Aedermannsdorf, Switzerland: Trans Tech, 1993. p. 140-142.

2. Preparation and properties of diamondlike carbon films

3. Diamond‐like carbon films grown using a saddle field source

4. Atom beam source

5. SEM and EMPA analysis of impurities related to GaAs substrates and MBE grown GaAs layers

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding;Japanese Journal of Applied Physics;2021-03-02

2. Influence of consumed power on structural and nano-mechanical properties of nano-structured diamond-like carbon thin films;Applied Surface Science;2014-05

3. Fabrication of GaInP/GaAs//Si Solar Cells by Surface Activated Direct Wafer Bonding;IEEE Journal of Photovoltaics;2013-10

4. Indigenous Ion Sources for Material Processing;Defence Science Journal;2009-07-27

5. Characterization of neutral beam source using dc cold cathode discharge and its application processes;Journal of Physics D: Applied Physics;2008-01-04