Optical properties of DLC films deposited by the saddle field fast atom neutral beam source-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Optical properties of DLC films deposited by the saddle field fast atom neutral beam source

Published:2005-11 Issue:2 Volume:169 Page:219-222
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Morshed M.M.,Cameron D.C.,McNamara B.P.,Hashmi M.S.J.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites

Reference18 articles.

1. Energy distribution and formation mechanism of fast atoms in a fast atom beam;Shimokawa;J. Appl. Phys.,1992

2. High-power fast-atom beam source and its application to dry etching;Shimokawa;J. Vac. Sci. Technol. A,1992

3. Preparation and properties of diamond like carbon films;Franks;J. Vac. Sci. Technol. A,1989

4. Characterisation of a saddle field source for deposition of diamond-like carbon films;Voevodin;Ceram. Int.,1996

5. Characterization studies of diamond-like carbon films growth using a saddle-field fast-atom-beam source;Sarangi;J. Vac. Sci. Technol. A,2000

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Production of energetic neutral particles and low energy electrons from four anode rods ion source;Review of Scientific Instruments;2013-11

2. Full mineralization of toluene by photocatalytic degradation with porous TiO2/SiC nanocomposite film;Journal of Alloys and Compounds;2013-03

3. UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD;Acta Physica Sinica;2013

4. Investigation of charge storage and retention characteristics of silicon nitride in NVM based on InGaZnO channels for system-on-panel applications;Microelectronic Engineering;2012-10

5. Nanoindentation measurements on modified diamond-like carbon thin films;Applied Surface Science;2011-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3