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Effects of internal stresses on the mechanical properties of deposition thin films

  • Published:2008-05 Issue:1-3 Volume:201 Page:770-774
  • ISSN:0924-0136
  • Container-title:Journal of Materials Processing Technology
  • language:en
  • Short-container-title:Journal of Materials Processing Technology

Author:

Chuang C.T.,Chao C.K.,Chang R.C.,Chu K.Y.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference17 articles.

1. Nanoindentation and FEM study of the effect of internal stress on micro nano mechanical property of thin CNx films;Bai;Thin Solid Films,2000

2. Handbook of Micro/Nanotribology;Bhushan,1999

3. Thin Film Materials: Stress, Defect Deformation, and Surface Evolution;Freund,2003

4. Thermal stresses in diamond coatings and their influence on coating wear and failure;Gunnars;Surf. Coat. Technol.,1996

5. Residual stress and thermal stress observation in thin copper films;Hanabusa;Thin Solid Films,2004
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