Ultrasonic-assisted underwater laser micromachining of silicon-Reference-Cited by-同舟云学术

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Ultrasonic-assisted underwater laser micromachining of silicon

Published:2016-05 Issue: Volume:231 Page:209-220
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Charee W.,Tangwarodomnukun V.^ORCID,Dumkum C.

Funder

KMUTT Research Fund

Research Strengthening Project of the Faculty of Engineering, King Mongkut’s University of Technology Thonburi

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference21 articles.

1. Effect of dry and wet ambient environment on the pulsed laser ablation of titanium;Ali;Appl. Surf. Sci.,2013

2. Laser ablation of silicon in water under different flow rates;Charee;Int. J. Adv. Manuf. Technol.,2015

3. Ultrasound assisted laser machining and surface cleaning;Chiu,2010

4. Excimer laser machining of bisphenol A polycarbonate under closed immersion filtered water with varying flow velocities and the effects on the etch rate;Dowding;Proc. Inst. Mech. Eng. B,2010

5. Development of an overflow-assisted underwater laser ablation;Duangwas;Mater. Manuf. Processes,2014

Cited by 48 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Energy partition in underwater nanosecond laser ablation;Applied Physics A;2024-04-09

2. Effects and mechanism of focusing condition on machining quality and bubble behaviors in femtosecond laser micro-grooving of silicon wafer in liquid;Optics & Laser Technology;2024-02

3. 超声复合激光制造技术研究进展（特邀）;Chinese Journal of Lasers;2024

4. Water jet guided laser grooving of SiCf/SiC ceramic matrix composites;Optics & Laser Technology;2024-01

5. Lateral Ultrasound-Assisted Underwater Laser Micromachining Process;2024

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