Development of a “walking drive” ultraprecision positioner-Reference-Cited by-同舟云学术

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Development of a “walking drive” ultraprecision positioner

Published:1997-03 Issue:2 Volume:20 Page:85-92
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Shamoto Eiji,Moriwaki Toshimichi

Publisher

Elsevier BV

Subject

General Engineering

Reference8 articles.

1. Precision X-Y stage with a piezo-driven fine-table;Moriyama;J JSPE,1984

2. A fast response piezoelectric actuator for servo correction of systematic errors in precision machining;Kouno;Ann CIRP,1984

3. Burleigh Instrument Inc. Catalog

4. Development of micro tool positioning system for precision machining;Moriwaki,1989

5. Precise positioner utilizing rapid deformations of a piezoelectric element;Higuchi;J. JSPE,1988

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3. Scalability of precision design principles for machines and instruments;CIRP Annals;2021

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