Author:
Furutani Katsushi,Enami Toshio,Mohri Naotake
Reference26 articles.
1. The liga technique—A novel concept for microstructures and the combination with si-technologies by injection molding;Menz,1991
2. High-aspect-ratio photolithography for MEMS applications;Miyajima;J Micro-electromechanical Sys,1995
3. Metallic microstructures fabricated using photosensitive polyimide electroplating molds;Frazier;J Microelectro-mechanical Sys,1993
4. Material incress manufacturing by rapid prototyping techniques;Kruth;Ann CIRP,1991
5. Manufacturing of high-aspect-ratio micro-structures using UV-sensitive photopolymer;Yamguchi;JSME Int J,1996
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