Nanometer-level autofocus air gauge-Reference-Cited by-同舟云学术

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Nanometer-level autofocus air gauge

Published:1998-10 Issue:4 Volume:22 Page:233-242
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Thomas Tim,Hamaker Chris,Martyniuk Jerry,Mirro Gene

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. An Introduction to Fluid Dynamics;Batchelor,1967

2. Modeling Engineering Systems;Lewis,1994

3. Ogata, K. System Dynamics

4. Hamaker, C. Etec Systems, Inc., Internal Publication

5. Fundamentals of Hot-Wire Anemometers;Lomas,1986

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1. Effective energy saving techniques for the system of pneumatic gauges;Materials Today: Proceedings;2023

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3. Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography;Optik;2014-11

4. Dynamic Properties of Small Chamber Air Gages;Journal of Dynamic Systems, Measurement, and Control;2011-12-02

5. Correction of the metrological properties of the pneumatic length measuring gauges through changes of the measuring nozzle head surface shape;Measurement;2010-11

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