Author:
Furutani Katsushi,Higuchi Toshiro,Yamagata Yutaka,Mohri Naotake
Reference11 articles.
1. Precise positioner utilizing rapid deformations of piezoelectric elements;Higuchi;J Japan Soc Prec Eng,1988
2. Higuchi, T., Yamagata, Y., Furutani, K. and Kudoh, K. “Precise positioning mechanism utilizing rapid deformations of piezoelectric elements,” Proceedings of the IEEE, Microelectromechanical systems, Napa Valley, California, 1990, 222–226
3. Dynamic Piezoelectric translation devices;Pohl;Rev Sci Instrum,1987
4. Simple piezoelectric translation device;Niedermann;Rev Sci Instrum,1988
5. A simple dynamic piezoelectric x–y translation stage suitable for scanning probe microscopes;Tapson;Rev Sci Instrum,1993
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