Author:
Yamaguchi Katsumi,Sakai Katsuhiko,Yamanaka Takashi,Hirayama Takao
Reference8 articles.
1. Mehregany M, Gabriel KJ, Trimmer WSN. Integrated fabrication of polysilicon mechanisms, IEEE Trans. Electron Devices, 1988, 35(6): 719–23.
2. Ehrfeld W. The LIGA processes for microsystems, Micro System Technologies 90, Proceedings of 1st International Conference on Micro Electro, Opto, Mechanic System and Components, 1990: 521–7.
3. Kikuchi K, Green PW, Maeda R. Micromachining of silicon wafer and Pyrex glass with excimer laser, J. of Mech. Engng. Lab. vol. 51, No. 2, 1997: 11–6.
4. Feygin M. Laminated object manufacturing, National Conference on Rapid Prototyping, 1990: 63–9.
5. DTM Corp. The Selective Laser sintering process, National Conference on Rapid Prototyping, 1990: 5–11.
Cited by
69 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献