Author:
Broomfield Keith,Stansfield Robert A.,Clary David C.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference70 articles.
1. VLSI Technology;Mogab,1983
2. Sputtering by Particle Bombardment I, Topics in Applied Physics 47;Sigmund,1981
3. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
4. Physical mechanisms of sputtering
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献