Author:
Duez N,Mutel B,Vivien C,Gengembre L,Goudmand P,Dessaux O,Grimblot J
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference10 articles.
1. L. Lonnoy, Doctoral Thesis, 1993, Lille University, France
2. Morphology of AlN formed in aluminum by ion implantation
3. Electrical Characteristics of a WSi x Contact Electrode with a WSi x N Diffusion Barrier Formed by Using Electron Cyclotron Resonance Plasma Nitridation
4. J. Pelletier, in: C.M. Ferreira, M. Moisan (Eds.), Microwave Discharges: Fundamentals and Applications, Plenum Press, New York, 1993
5. AlN formation by direct nitrogen implantation using a DECR plasma
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献