Interfacial reaction study of thermally annealed Ti film on 4H-SiC by soft X-ray emission spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference14 articles.
1. Electronic structure of silicon carbide polytypes studied by soft x-ray spectroscopy
2. Kinetic control of silicon carbide/metal reactions
3. Room temperature reaction at Ti/β-SiC(100) interface
4. Interaction between SiC and Ti powder
5. Chemistry, microstructure, and electrical properties at interfaces between thin films of titanium and alpha (6H) silicon carbide (0001)
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