Author:
Nakakura C.Y.,Altman E.I.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference37 articles.
1. Metallization: Theory and Practice for VLSI and ULSI;Murarka,1993
2. Silicon Processing for the VLSI Era, Vol. 1, Process Technology;Wolf,1986
3. Plasma-assisted etching mechanisms: The implications of reaction probability and halogen coverage
Cited by
31 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献