Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point ADC-Reference-Cited by-同舟云学术

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Design of a high precision digital interface circuit for capacitive MEMS accelerometers with floating point ADC

Published:2017-09 Issue: Volume:59 Page:247-254
ISSN:0167-9260
Container-title:Integration
language:en
Short-container-title:Integration

Author:

Li Zongwei,Xiong Xingyin,Liu Xiong,Han Kedu,Cong Ning,Yang Changchun

Funder

National Major Scientific Research Instruments and Equipment Development

National Science and Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Software

Reference20 articles.

1. Y.C. Wang, V.P. Chodavarapu, Design of a CMOS readout circuit for wide-temperature range capacitive MEMS sensors, in: Proceedings of the 15th International'l Symposium on Quality Electronic Design Conference, March, 2014. pp. 738–742.

2. M. Pastre, M. Kayal, H. Schmid, A 300Hz 19b DR capacitive accelerometer based on a versatile front end in a 5th-order delta sigma loop, in: Proceedings of ESSCIRC’09, the 35th European Solid-State Circuits Conference, September 2009, pp. 288-291.

3. H. Schmid, S. Sigel, M. Pastre, An internally non-linear ADC for a sigma delta accelerometer loop, in: Proceedings of 2010 IEEE International Symposium on Circuits and Systems Conference, May–June, 2010, pp. 2155–2158.

4. P. Zwahlen, Y. Dong, A.-.M. Nguyen, Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer, in: IEEE/ION Position Location and Navigation Symposium (PLANS) Conference, April, 2012, pp. 15–19.

5. A high-resolution accelerometer with electrostatic damping and improved supply sensitivity;Yucetas;IEEE J. Solid-State Circuits,2012

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Implementación en hardware para la medición de la aceleración usando FPGA;Revista Sapientía;2023-09-11

2. A low noise capacitive MEMS accelerometer with anti-spring structure;Sensors and Actuators A: Physical;2019-09

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