Deposition of alumina thin film by dual magnetron sputtering: Is it γ-Al2O3?
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference35 articles.
1. Ab initiocalculations for the neutral and charged O vacancy in sapphire
2. Ab initiostudy ofγ−Al2O3surfaces
3. Cubic to monoclinic phase transformations in alumina
4. Transition metal atoms on different alumina phases: The role of subsurface sites on catalytic activity
5. Localized epitaxial growth of α-Al2O3 thin films on Cr2O3 template by sputter deposition at low substrate temperature
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