X-ray diffraction measurement of residual stress in PZT thin films prepared by pulsed laser deposition
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Ferroelectric Ceramics: History and Technology
2. Ferroelectric Memories
3. Anelastic deformation of Pb(Zr,Ti)O3 thin films by non-180° ferroelectric domain wall movements during nanoindentation
4. Mechanical deformation of PZT thin films for MEMS applications
5. Nano-indentation fracture test of Pb(Zr0.52Ti0.48)O3 ferroelectric thin films
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