Real-time control of AlN incorporation in epitaxial Hf1−xAlxN using high-flux, low-energy (10–40eV) ion bombardment during reactive magnetron sputter deposition from a Hf0.7Al0.3 alloy target-Reference-Cited by-同舟云学术

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Real-time control of AlN incorporation in epitaxial Hf1−xAlxN using high-flux, low-energy (10–40eV) ion bombardment during reactive magnetron sputter deposition from a Hf0.7Al0.3 alloy target

Published:2011-01 Issue:2 Volume:59 Page:421-428
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

Howe B.M.,Sammann E.,Wen J.G.,Spila T.,Greene J.E.,Hultman L.,Petrov I.

Publisher

Elsevier BV

Subject

Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mechanical and Tribological Properties of NbAl, NbAlN, and NbAIN-CH Coatings Deposited using Various Niobium Target Currents and Acetylene Flow Rates;Journal of Materials Engineering and Performance;2022-01-20

2. Microstructural, mechanical, thermal stability and oxidation behavior of TiSiN/CrV N multilayer coatings deposited by D.C. reactive magnetron sputtering;Surface and Coatings Technology;2021-01

3. Mechanical and Tribological Properties and High-Speed Drilling Performance of NbTiN Coatings Prepared by High-Power Impulse Magnetron Sputtering with Varying Nitrogen and Acetylene Flux Rates;Journal of Materials Engineering and Performance;2020-11-13

4. Texture evolution of vanadium nitride thin films;Thin Solid Films;2019-10

5. Effects of Bombarding Ions Energy on Structure and Mechanical Properties of V2AlC MAX-phase Coatings;CHINA SURF ENG;2019

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