Investigation of Cu growth phenomena on Ru substrate during electroless deposition using hydrazine as a reducing agent
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference36 articles.
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1. Reinforcement in electromigration reliability of Cu interconnects by alloying of extremely dilute MnO;Journal of Alloys and Compounds;2023-08
2. Electroless Plating of Ru Using Hydrazine Hydrate as a Reducing Agent;Journal of Electronic Materials;2023-07-26
3. Fabrication of junction-free Cu nanowire networks via Ru-catalyzed electroless deposition and their application to transparent conducting electrodes;Nanotechnology;2021-11-18
4. Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper;Applied Sciences;2021-09-10
5. Recent Advances in Barrier Layer of Cu Interconnects;Materials;2020-11-09
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