Electrodeposition of Ru by atomic layer deposition (ALD)
Author:
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference101 articles.
1. Polymer Electrolyte Fuel Cells
2. Diffusion Studies of Copper on Ruthenium Thin Film
3. Electrodeposition of Copper Thin Film on Ruthenium
4. Seedless Superfill: Copper Electrodeposition in Trenches with Ruthenium Barriers
5. Electrodeposition of Cu on Ru Barrier Layers for Damascene Processing
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