Effects of electrolyte type and concentration on the anodic oxidation of 4H-SiC (0001) in slurryless electrochemical mechanical polishing-Reference-Cited by-同舟云学术

Effects of electrolyte type and concentration on the anodic oxidation of 4H-SiC (0001) in slurryless electrochemical mechanical polishing

Published:2024-01 Issue: Volume:474 Page:143531
ISSN:0013-4686
Container-title:Electrochimica Acta
language:en
Short-container-title:Electrochimica Acta

Author:

Yang Xiaozhe,Yang Xu,Yamamura Kazuya

Publisher

Elsevier BV

Subject

Electrochemistry,General Chemical Engineering

Reference22 articles.

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3. Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron;Tribology International;2024-05