Comparative investigation of the structure and mechanical properties of AlCrN and AlCrVYN thin films deposited by dcMS, HiPIMS, and hybrid dcMS/HiPIMS-Reference-Cited by-同舟云学术

Comparative investigation of the structure and mechanical properties of AlCrN and AlCrVYN thin films deposited by dcMS, HiPIMS, and hybrid dcMS/HiPIMS

Published:2024-04 Issue: Volume:5 Page:100120
ISSN:2773-207X
Container-title:Hybrid Advances
language:en
Short-container-title:Hybrid Advances

Author:

Tillmann Wolfgang,Ontrup Finn^ORCID,Schneider Eric,Paulus Michael,Sternemann Christian,Lopes Dias Nelson Filipe

Funder

German Research Foundation

Publisher

Elsevier BV

Reference45 articles.

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4. Structural investigations of aluminum-chromium-nitride hard coatings by Raman micro-spectroscopy;Kaindl;Thin Solid Films,2006

5. Synthesis of pseudobinary Cr-Al-N films with B1 structure by rf-assisted magnetron sputtering method;Makino;Surf. Coating. Technol.,1998

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