Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model-Reference-Cited by-同舟云学术

Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model

Published:2006-03 Issue:1 Volume:128 Page:52-59
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Jiang Tao,Wang Anlin,Jiao Jiwei,Liu Guangjun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Commercial vision of silicon-based inertial sensors;Song;Sens. Actuators A,1998

2. The state of the art of micromachined gyroscope;Li;Adv. Mech.,2003

3. Evolution and trends in microsensors;Guerrero;Micromac. Dev.,1999

4. Micromachined silicon gyroscope;Ohwada;Sens. Update,1999

5. Micromachined inertial sensors;Yazdi,1998

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sensor Design Migration: The Case of a VRG;IEEE Sensors Journal;2019-11-15

2. Nonlinear structural behavior of a size-dependent MEMS gyroscope assuming a non-trivial shaped proof mass;Microsystem Technologies;2019-07-04

3. An overview on the appearance of the Sommerfeld effect and saturation phenomenon in non-ideal vibrating systems (NIS) in macro and MEMS scales;Nonlinear Dynamics;2018-02-12

4. Dynamics behaviour of an elastic non-ideal (NIS) portal frame, including fractional nonlinearities;Journal of Physics: Conference Series;2016-05

5. The Development of Micromachined Gyroscope Structure and Circuitry Technology;Sensors;2014-01-14