1. Micromachined convective accelerometers in standard integrated circuits technology;Milanovic;Appl. Phys. Lett.,2000
2. V. Milanovic, E. Bowen, N. Tea, J. Suehle, B. Payne, M. Zaghloul, M. Gaitan, Convection-based accelerometer and tilt sensor implemented in standard CMOS, in: International Mechanical Engineering and Exposition, MEMS Symposia, Anaheim, CA, 1998, pp. 487–490.
3. A.M. Leung, J. Jones, E. Czyzewska, J. Chen, B. Woods, Micromachined accelerometer based on convection heat transfer, in: Proceedings of the IEEE MEMS’98, Heidelberg-Germany, January 25–29, 1998, pp. 627–630.
4. A.M. Leung, J. Jones, E. Czyzewska, J. Chen, M. Pascal, Micromachined accelerometer with no proof mass, in: Proceedings of the Technical Digest of International Electron Device Meeting (IEDM97), 1997, pp. 899–902.
5. Micromachined inclinometer with high sensitivity and very good stability;Billat;Sens. Actuators A,2002