Effect of shape factors and material property variations on modeling the response of thermal microactuators-Reference-Cited by-同舟云学术

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Effect of shape factors and material property variations on modeling the response of thermal microactuators

Published:2007-02 Issue:1 Volume:134 Page:69-76
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Atre Amarendra

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Surface micromachined polysilicon thermal actuator arrays and applications;Comtois,1997

2. Vertical thermal actuators for micro-opto-electromechanical systems;Cowan;SPIE,1997

3. R.K. Messenger, Modeling and control of surface micromachined thermal actuators, MS Thesis, Brigham Young University, Provo, Utah, 2004.

4. Design optimization of a surface micromachined electro-thermal beam flexure polysilicon actuator;Atre,2005

5. Analysis and design of polysilicon thermal flexure actuator;Huang;J. Micromech. Microeng.,1999

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Emerging Challenges of Microactuators for Nanoscale Positioning, Assembly, and Manipulation;Journal of Manufacturing Science and Engineering;2010-06-01

2. Effect of microscale gaseous thermal conduction on the thermal behavior of a buckled microbridge;Smart Materials and Structures;2008-01-08

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