A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication-Reference-Cited by-同舟云学术

A piezoelectric micro-actuator with a three-dimensional structure and its micro-fabrication

Published:2006-08 Issue: Volume:130-131 Page:491-496
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gao Peng,Yao Kui,Tang Xiaosong,He Xujiang,Shannigrahi Santiranjan,Lou Yaolong,Zhang Jian,Okada Kanzo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

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2. High-stiffness precision actuator for small displacements;Portman;Int. J. Mach. Tools Manuf.,1999

3. Piezoelectric piggy-back microactuator for hard disk drive;Soeno;IEEE Trans. Magn.,1999

4. Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation;Yao;IEEE Trans. Ultrason. Ferroelect. Freq. Control,1999

5. Piezoelectric Actuators and Ultrasonic Motors;Uchino,1997

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