Odd-harmonic repetitive control for high-speed raster scanning of piezo-actuated nanopositioning stages with hysteresis nonlinearity-Reference-Cited by-同舟云学术

Odd-harmonic repetitive control for high-speed raster scanning of piezo-actuated nanopositioning stages with hysteresis nonlinearity

Published:2016-06 Issue: Volume:244 Page:95-105
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Chun-Xia,Gu Guo-Ying,Zhu Li-Min,Su Chun-Yi

Funder

National Natural Science Foundation of China

Science and Technology Commission of Shanghai Municipality

Specialized Research Fund for the Doctoral Programme of Higher Education

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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