Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology-Reference-Cited by-同舟云学术

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Published:2006-01 Issue:1 Volume:126 Page:227-240
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Galayko Dimitri,Kaiser Andreas,Legrand Bernard,Buchaillot Lionel,Combi Chantal,Collard Dominique

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. C.T.-C. Nguyen, L.P.B. Katehi, G.M. Rebeiz, Micromachined devices for wireless communications, vol. 86, no. 8, in: Proceeding of the IEEE, August 1998.

2. http://www.isen.fr/recherche/melodict, Official Web-site of the MELODICT European Project Micromachined Electromechanical Devices for Integrated Wireless Communication Transceivers, IST, 1999, p. 10945.

3. VHF free–free beam high-Q micromechanical resonators, Technical Digest 12th International IEEE Micro Electro Mechanical Systems Conference;Wang,1999

4. M.A. Abdelmoneum, M.U. Demirci, C.T.-T. Nguyen, Stemless wine-glass-mode disk micromechanical resonators, IEEE MEMS Conference, January 2003, Kyoto, Japan, pp. 698–701.

5. High-Q VHF micromechanical contour-mode disk resonators, Technical Digest IEEE International Electron Devices Meeting;Clark,2000

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS Electrostatically Driven Coupled Beam Filter Banks;Micromachines;2023-12-07

2. Investigation of a Bandpass Filter Based on Nonlinear Modal Coupling via 2:1 Internal Resonance of Electrostatically Actuated Clamped-Guided Microbeams;Journal of Vibration Engineering & Technologies;2023-08-03

3. Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters;Micromachines;2021-09-30

4. Mechanically coupled clamped circular plate resonators: modeling, design and experimental verification;Journal of Micromechanics and Microengineering;2021-08-27

5. New architectures for micromechanical coupled beam array filters;Microsystem Technologies;2020-12-03